Gas Cluster Ion Source (GCIS) (Minibeam 6)

This multi-mode gas cluster ion source is designed to operate in both Arn+ cluster and Ar+ monatomic modes making it suitable for sputter cleaning and depth profiling organic, inorganic, and metallic thin films.  In addition, it may also be used to generate low-energy He+ ions for use with ion scattering spectroscopy (ISS).

Minibeam 6 | Gas Cluster Ion Beam Source | Kratos Analytical